ʻO WVCP6000 Water Vapor Cryopump Cryogenic Refrigeration Systems
Hōʻike huahana
ʻO Guangzhou Xieyi Automation Technology Co., Ltd., i hoʻokumu ʻia i ka makahiki 2011, ʻo ia ka ʻoihana kiʻekiʻe kiʻekiʻe ma Kina Hema e hana nei i ka hoʻomohala noiʻi, hana, kūkākūkā ʻenehana a me ka lawelawe ʻana no nā ʻōpala hopu wai wai wela loa a me nā mea ʻē aʻe. mea hana wela loa.
XIEYI WVCP Cryochillers ua pani ia loop cryogenic refrigeration nenoai e haawi 550 watts ~ 6,000 watts o ka hooluolu.Hiki ke hoʻohana ʻia kēia mau cryochillers no ka hopu ʻana i ka mahu wai a me nā mea condensable ʻē aʻe ma ka hoʻokuʻu ʻana iā lākou ma kahi ʻili anu e like me ka Meissner coil (cryocoil).Hoʻohana pū ʻia nā cryochillers WVCP e hōʻoluʻolu i nā mea e like me ka electrostatic chucks i hoʻohana ʻia i ka hana wafer semiconductor.
ʻĀpana ʻenehana
| Hoʻohālike | WVCP6000-SH | WVCP6000-DH |
| Hiki ke hoʻoluʻu kiʻekiʻe (W) | 6000 | 6000 |
| ʻO ka manaʻo kiʻekiʻe ka wikiwiki o ka paila ʻana o ka pahele anu tubular (L/S) | 588000 | 588000 |
| ʻO ke kumumanaʻo ka wikiwiki kiʻekiʻe o ka pā anu (L/S) | 882000 | 882000 |
| Māmā hope (mbar) | 2*10-8 | 2*10-8 |
| Ka manawa hoʻoheheʻe o ka ʻāpana pahele anu (min) | <5 | <5 |
| Hiki ke hoʻololi ʻia ka mahana defrost (℃) | -20~30 | -20~30 |
| Ke ano mana kaomi | Kikohoʻe kikohoʻe+Mechanical kuapo | Kikohoʻe kikohoʻe+Mechanical kuapo |
| Hoʻihoʻi wikiwiki i ka hana kaomi kaulike (QRBP) | ʻAe | ʻAe |
| ʻO ka hana hōʻoiaʻiʻo pale ʻaila (OBP) | ʻAe | ʻAe |
| 4G Mana mamao | ʻAe | ʻAe |
| Nā waiwai media anu | Pro-kaiapuni | Pro-kaiapuni |
| ʻO ka ʻāpana ili kiʻekiʻe o ka pahele anu tubular(㎡) | 4 | 4 |
| Ka ʻāpana ili kiʻekiʻe o ka pā anu (㎡) | 6 | 6 |
| Hōʻike o ka pahele anu hoʻokahi (㎡) | φ16mm*80m | / |
| Hōʻike o ka pahele anu lua (㎡) | / | 2*φ16mm*40m |
| Kinohi kinoea | 12.7 hui wili keleawe (Maʻamau) | 12.7 hui wili keleawe (Maʻamau) |
| ParkerCPI/VCR(Koho) | ParkerCPI/VCR(Koho) | |
| Kahe wai anuanu (L/Min ma 24 ℃) | 48 | 48 |
| ʻO ka wela hoʻohāhā wai hoʻoluʻu (℃) | 38 | 38 |
| Hale hooluolu | ʻAe | ʻAe |
| Mea hoʻohui wai hoʻoluʻu (L/S) | G1” | G1” |
| Ka mana hoʻouka kiʻekiʻe (kW) | 25.3 | 25.3 |
| Ka mana nominal compressor (HP) | 20 | 20 |
| Hāʻawi mana (50HZ) | 380-400V AC 3P(H) | 380-400V AC 3P(H) |
| 200-230V AC 3P(L) | 200-230V AC 3P(L) | |
| Ana (MM) | 935(L)*873(D)*1809(H) | 1235(L)*873(D)*1809(H) |
| Kaumaha(KG) | 655 | 655 |
E kākau i kāu leka ma aneʻi a hoʻouna mai iā mākou
