WVCP3000 Wai mahu Cryopump Cryogenic Pūnaehana Refrigeration
Hōʻike huahana
ʻO Guangzhou Xieyi Automation Technology Co., Ltd., i hoʻokumu ʻia i ka makahiki 2011, ʻo ia ka ʻoihana kiʻekiʻe kiʻekiʻe ma Kina Hema e hana nei i ka hoʻomohala noiʻi, hana, kūkākūkā ʻenehana a me ka lawelawe ʻana no nā ʻōpala hopu wai wai wela loa a me nā mea ʻē aʻe. mea hana wela loa.
XIEYI WVCP Cryochillers ua pani ia loop cryogenic refrigeration nenoai e haawi 550 watts ~ 6,000 watts o ka hooluolu.Hiki ke hoʻohana ʻia kēia mau cryochillers no ka hopu ʻana i ka mahu wai a me nā mea condensable ʻē aʻe ma ka hoʻokuʻu ʻana iā lākou ma kahi ʻili anu e like me ka Meissner coil (cryocoil).Hoʻohana pū ʻia nā cryochillers WVCP e hōʻoluʻolu i nā mea e like me ka electrostatic chucks i hoʻohana ʻia i ka hana wafer semiconductor.
ʻĀpana ʻenehana
Hoʻohālike | WVCP3000-SH | WVCP3000-DH |
Hiki ke hoʻoluʻu kiʻekiʻe (W) | 3000 | 3000 |
ʻO ka manaʻo kiʻekiʻe ka wikiwiki o ka paila ʻana o ka pahele anu tubular (L/S) | 249900 | 249900 |
ʻO ke kumumanaʻo ka wikiwiki kiʻekiʻe o ka pā anu (L/S) | 352800 | 352800 |
Māmā hope (mbar) | 2*10-8 | 2*10-8 |
Ka manawa hoʻoheheʻe o ka ʻāpana pahele anu (min) | <3 | <3 |
Hiki ke hoʻololi ʻia ka mahana defrost (℃) | -20~30 | -20~30 |
Ke ano mana kaomi | Kikohoʻe kikohoʻe+Mechanical kuapo | Kikohoʻe kikohoʻe+Mechanical kuapo |
Hoʻihoʻi wikiwiki i ka hana kaomi kaulike (QRBP) | ʻAe | ʻAe |
ʻO ka hana hōʻoiaʻiʻo pale ʻaila (OBP) | ʻAe | ʻAe |
4G Mana mamao | ʻAe | ʻAe |
Nā waiwai media anu | Pro-kaiapuni | Pro-kaiapuni |
ʻO ka ʻāpana ili kiʻekiʻe o ka pahele anu tubular(㎡) | 1.7 | 1.7 |
Ka ʻāpana ili kiʻekiʻe o ka pā anu (㎡) | 2.4 | 2.4 |
Hōʻike o ka pahele anu hoʻokahi (㎡) | φ16mm*34m | / |
Hōʻike o ka pahele anu lua (㎡) | / | 2*φ16mm*17m |
Kinohi kinoea | 12.7 hui wili keleawe (Maʻamau) | 12.7 hui wili keleawe (Maʻamau) |
ParkerCPI/VCR(Koho) | ParkerCPI/VCR(Koho) | |
Kahe wai anuanu (L/Min ma 24 ℃) | 28 | 28 |
ʻO ka wela hoʻohāhā wai hoʻoluʻu (℃) | 38 | 38 |
Hale hooluolu | ʻAe | ʻAe |
Mea hoʻohui wai hoʻoluʻu (L/S) | G3/4 | G3/4 |
Ka mana hoʻouka kiʻekiʻe (kW) | 16.5 | 16.5 |
Ka mana nominal compressor (HP) | 10 | 10 |
Hāʻawi mana (50HZ) | 380-400V AC 3P(H) | 380-400V AC 3P(H) |
200-230V AC 3P(L) | 200-230V AC 3P(L) | |
Ana (MM) | 935(L)*873(D)*1809(H) | 935(L)*873(D)*1809(H) |
Kaumaha(KG) | 480 | 480 |
E kākau i kāu leka ma aneʻi a hoʻouna mai iā mākou